high pressure furnace (484) Online Manufacturer
Process Temperature((℃): 700-1050
Precursors And Process Gases: TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
Max.working Temperature(℃): 1200
Temperature Uniformity(℃): ≤±3
Max.working Temperature: 1800℃
Temperature Uniformity: ≤±5℃
Max.working Temperature: 1800℃
Temperature Uniformity: ≤±5℃
Packaging Details: wooden cases
Delivery Time: 5-6monthes
Effecive Space(mm): 1000*1000*1500
Heating Power(KVA): 300
Max.working Temperature: 2400℃
Temperature Uniformity: ≤±10℃
Max.working Temperature(℃): 1300
Temperature Uniformity(℃): ≤±3
Structure: Single Chamber,horizental Type
Dimension: Customized
Effecive Space(mm): 1000*1000*1500
Heating Power(KVA): 300
Effecive Space(mm): 1000*1000*1500
Heating Power(KVA): 300
Working Space: 400*400*1200mm, Or Customized According To Customer Needs
Working Pressure: 60 Bar
Process Temperature((℃): 700-1050
Precursors And Process Gases: TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
Process Temperature((℃): 700-1050
Precursors And Process Gases: TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
Process Temperature((℃): 700-1050
Precursors And Process Gases: TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
Chamber Size: Customizable(200*200*400/400*400*1200/500*500*1800mm)
Ultimate Vacuum: 3,67*10-3 Pa
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