Process Temperature((℃): 700-1050
Precursors And Process Gases: TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
Process Temperature((℃): 700-1050
Precursors And Process Gases: TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
Process Temperature((℃): 700-1050
Precursors And Process Gases: TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
Max.working Temperature(℃): 1300
Temperature Uniformity(℃): ≤±7
Process Temperature((℃): 700-1050
Precursors And Process Gases: TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
Process Temperature((℃): 700-1050
Types Of Coating: TiC、TiN、TiCN、a-AL2O3、K-AI2O3
Process Temperature((℃): 700-1050
Types Of Coating: TiC、TiN、TiCN、a-AL2O3、K-AI2O3
Process Temperature((℃): 700-1050
Types Of Coating: TiC、TiN、TiCN、a-AL2O3、K-AI2O3
Effecive Space(mm): 1000*1000*1500
Heating Power(KVA): 300
Effecive Space(mm): 1000*1000*1500
Heating Power(KVA): 300
Effecive Space(mm): 1000*1000*1500
Heating Power(KVA): 300
Heating Zone: 4pcs/5pcs
Maximum Temperature:: 1100℃
Reactor: 2pcs
Maximum Temperature:: 1100℃
Reactor: 2 Pcs
Maximum Temperature:: 1100℃
Coating Temperature: 200-1050℃
Cooling System: 2 Sets Of High-performance Water-cooled Condensate Traps
Cooling System: 2 Sets Of High-performance Water-cooled Condensate Traps
Coating Temperature: 200-1050℃
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