Place of Origin:
China
Brand Name:
Ruideer
Certification:
CE
Model Number:
Customizable
Silicon Carbide CVD coating furnace for graphite susceptor or etching ring
This equipment is used for the deposition of silicon carbide on the surface of carbon-based/ceramic-based material,expecially for semiconductor susceptor and etching ring.
Graphite susceptor, a high-purity graphite disk, with a circular groove on it to fix the wafer substrate.After placing them in the furnace, a layer of crystal film will grow on the surface of the substrate, which is the epitaxial layer.
Wafer processes such as lithography and ion implantation are all carried out on the epitaxial layer.The epitaxial base made of graphite obviously cannot meet the ultra-high cleanliness requirements in the semiconductor process.
For this reason, we need to use chemical vapor deposition on the base to wrap a layer of dense silicon carbide film.
| Max working temperature(℃) | 1500℃ |
| Temperature uniformity(℃) | ≤7 |
| Ultimate vacuum(Pa) | 10 |
| Process gas | MTS,Ar,H2 |
• Design standards
The equipment is designed in accordance with the pressure vessel requirements of the Quality and Technical Supervision Bureau, and is qualified after pressure testing and shipped. The electrical design and construction meet national standards.
• Installation pre-test and pre-acceptance
The equipment is fully assembled in our factory, including all pipelines, vacuum pipelines, process gas pipelines, cooling water pipelines, compressed air pipelines, etc. Pre-testing can be carried out after installation. At the customer site, pipelines other than the equipment are provided by the customer. The installation also includes the connection of all cables. At the customer site, the main cable connecting the power cabinet is provided by the customer. After installation, we conduct vacuum and positive pressure leakage tests on the entire equipment, as well as mechanical and electrical function tests.
• Disassembly and transportation
The equipment will be disassembled in several large parts, packed in a standardized manner, and loaded into the transport vehicle.
• Customer site installation and commissioning
The Redel after-sales engineer will lead the team to complete commissioning, product trial burning and other work within 20 working days. The customer needs to make appropriate preparations and provide the necessary tools, such as hoisting and lifting equipment. And provide installation personnel support (it is recommended to have 1 mechanical personnel and 1 electrical personnel).
• Final acceptance
After installation and commissioning, the equipment can be finally accepted in accordance with the requirements of the technical contract.
• Training
Our after-sales engineers will provide a systematic and complete on-site training, including operation, maintenance, troubleshooting, etc.
• Technical data delivery
To ensure safe operation and equipment maintenance, the following technical data will be provided to customers:
1. Equipment installation layout
2. User manual
3. Spare parts list
4. Electrical drawings
5. Component manual
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