integrated cvd coating machine (4) Online Manufacturer
Reaction Chamber: 2 Pcs
Maximum Temperature:: 1100℃
Precursors And Process Gases: TiCl4、AlCl3、CH3CN、H2、N2、Ar、CH4、CO、CO2、HCl、H2S
Coating Equipment Size: Customizable
Coating Method: Chemical Vapor Deposition (CVD)
Total Power: About 40/50/60/80KW
Process Temperature((℃): 700-1050
Precursors And Process Gases: TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
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