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TiC/TiN/TiCN/a-Al2O3/k-Al2O3 Coatings CVD Furnace with 700-1050°C Temperature Control

TiC/TiN/TiCN/a-Al2O3/k-Al2O3 Coatings CVD Furnace with 700-1050°C Temperature Control

k-Al2O3 CVD Furnace

TiC CVD Furnace

a-Al2O3 CVD Furnace

Place of Origin:

China

Brand Name:

Ruideer

Model Number:

630,530,430

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Product Details
Heating Zone:
4pcs/5pcs
Maximum Temperature::
1100℃
Working Temperature:
700-1050°C
Coating Types:
TiC/TiN/TiCN/a-Al2O3/k-Al2O3
Heating Power:
39/48/45/55/65/80KW
Effective Size Of Reaction Chamber:
φ400mm×1250 Mm;φ400mm×1600 Mm;φ500mm×1250 Mm;φ500mm×1600 Mm;φ600mm×1200 Mm;φ600mm×1600 Mm;
Payment & Shipping Terms
Minimum Order Quantity
1 set
Price
USD1200000.00-20000000.00
Packaging Details
Special wooden box
Delivery Time
4-5monthes
Payment Terms
L/C, T/T
Supply Ability
5-6 months/set
Product Description

TiC/TiN/TiCN/a-Al2O3/k-Al2O3 coatings chemical vapor deposition CVD furnace

 

1. Main technical parameters

1. Power supply voltage: 380V 50HZ;
2. Maximum temperature: 1100°C;
3. Working temperature: 900-1050°C;
4. Total power: about 75KW;
5. Heating power: about 55KW;
6. Number of reaction chambers: 2
7. Effective size of reaction chamber: φ500 (inner diameter) mm×1500 (effective
height) mm;
8. Occupation size (l×w×h) : 8100×7000×5100mm;
9. Equipment weight: about 10T
 
 
2. Assembly Group
The CVD coating furnace consists of six parts: workbench, reaction chamber, heating cover, cooling cover, rail crane, condenser.
 
3. Equipment Strengths

3.1. Small floor space and reasonable layout.

3.2. High degree of automation.

3.3.Supporting auxiliary equipment such as tail gas neutralization device, titanium tetrachloride filling device, gas busbar, etc., can be provided.

3.4. Process control system is conducive to independent R&D of new processes.

 

4.CVD graphit boat

   Various types of graphite boats can be provided.

 

5.CVD reaction chamber

   The CVD reaction chambers are centrifugally cast with high -temperature alloy,which can greatly reduce deformation adn increase the life time to 200 furnaces.

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