1. Assembly Group
The CVD coating furnace consists of six parts: workbench, reaction chamber, heating cover, cooling cover, rail crane, condenser.
The major systems are cooling water system, pump system, gas tube&pipeline system, aerodynamic system and electrical control system.
2. Factory working environment
2.1 Ambient humidity and temperature
2.1.1 Ambient humidity: <90% (at +35°C)
2.1.2 Ambient temperature: 5℃～40℃
2.2 Power supply
2.2.1 Power supply: 380V±10%, 50Hz, three-phase five-wire system
2.2.2 Control power supply: 210V～250V, 50Hz, single phase
2.3 Air source
2.3.1 Compressed air pressure: 6-7bar,
2.3.2 Ar pressure: 2-3bar,
2.3.3 H2 pressure and flow: 2-3bar, 0-75slm
2.3.4 N2 pressure and flow: 2-3bar, 0-50slm
2.3.5 CO pressure and flow: 2-3bar, 0-2.5slm
2.3.6 CO2 pressure and flow: 2-3bar, 0-5slm
2.3.7 CH4 pressure and flow: 2-3bar, 0-5slm
2.3.8 HCl pressure and flow: 2-3bar, 0-5slm
2.3.9 H2S pressure and flow: 2-3bar, 0-0.4slm
2.4 Water source
2.4.1 Cooling water inlet pressure: 2-3bar, pure water is recommended. The temperature is 13-16°C. (Customers need to be equipped with chilled water), cooling water flow, 5m3/h.
2.4.2 Emergency standby water source (to be prepared by the user)