Highly Automatic RDE 530L CVD Coating Machine With Two Reaction Chambers

Highly Automatic RDE 530L CVD Coating Furnace With Two Reaction Chambers

1. Equipment Strengths

1.1 Automatic Mode. According to the process settings, the individual components and processes are automatically controlled. Automatic control includes valve switch, process gas flow control, process liquid flow control, reactor pressure control, heating furnace and electric heating belt temperature control, etc., without human intervention in the whole process. The automatic operation process realizes automatic alarm processing. According to different alarm types, it will automatically enter the alarm mode to protect the products in the furnace. After the alarm is released, it can be manually restored to the state before the alarm.

1.2. The process is monitored throughout the process, all sensor data and valve status are saved to historical data, which can be viewed at any time.

1.3. Manual mode. There is a safety interlock, which automatically realizes the lock according to the gas type and temperature inside the reactor, and the reactor cannot be opened at will. The manual mode is set with one-button operation, such as vacuuming, H₂ purge, N₂ purge, etc., no need to manually move individual valves and vacuum pumps.

1.4. The alarm data is automatically saved, and the historical data can be retrieved at any time.

2. Factory working environment

2.1 Ambient humidity and temperature

2.1.1 Ambient humidity: <90% (at +35°C)

2.1.2 Ambient temperature: 5℃～40℃

2.2 Power supply

2.2.1 Power supply: 380V±10%, 50Hz, three-phase five-wire system

2.2.2 Control power supply: 210V～250V, 50Hz, single phase

2.3 Air source

2.3.1 Compressed air pressure: 6-7bar,

2.3.2 Ar pressure: 2-3bar,

2.3.3 H₂ pressure and flow: 2-3bar, 0-75slm

2.3.4 N₂ pressure and flow: 2-3bar, 0-50slm

2.3.5 CO pressure and flow: 2—3bar, 0-2.5slm

2.3.6 CO₂ pressure and flow: 2-3bar, 0-5slm

2.3.7 CH₄ pressure and flow: 2-3bar, 0-5slm

2.3.8 HCl pressure and flow: 2-3bar, 0-5slm

2.3.9 H₂S pressure and flow: 2-3bar, 0-0.4slm

2.4 Water source

2.4.1 Cooling water inlet pressure: 2-3bar, pure water is recommended. The temperature is 13-16°C. (Customers need to be equipped with chilled water), cooling water flow, 5m³/h.

2.4.2 Emergency standby water source (to be prepared by the user)

Pressure: 1.5bar—2bar.